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Microstructural analysis of Ga1-xMnxN films grown by PEMBE

Authors
Kim, I.Kim, J.Han, S. H.
Issue Date
May-2004
Publisher
ELSEVIER SCIENCE BV
Keywords
magnetic semiconductors; Ga1-xMnxN; structural analysis; interfacial defect; TEM
Citation
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, v.272, pp E1529 - E1531
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Volume
272
Start Page
E1529
End Page
E1531
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46593
DOI
10.1016/j.jmmm.2003.12.797
ISSN
0304-8853
1873-4766
Abstract
The microstructural changes of Ga1-xMnxN films grown at various substrate temperatures ( 350 - 700 degrees C) by a PEMBE system have been investigated using transmission electron microscopy. Ga1-xMnxN film with low dislocation density was grown epitaxially at 700 degrees C but dislocation density increased with the decrease of substrate temperature. Moreover, HCP and FCC structures coexisted in the vicinity of interface between GaNand Ga1-xMnxN films grown below 450 degrees C. (C) 2004 Elsevier B. V. All rights reserved.
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ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)
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