Bulk image formation of scalar modeling in a photoresist

Abstract

Most people consider bulk images of chemically amplified resists (CAR) are to be the same as those of non-CAR. However, the physical, the chemical, and the optical behaviors of CAR are different from those of non-CAR. In this study, the intensity and the acid distributions for CAR, and non-CAR are simulated and compared by using the vertical propagation model, the standard model (or the defocus model), the second-order correction model, and the full scalar model. To discuss and analyze the intensity and the acid distributions, we calculate aerial images of the projection lens systems by using scalar diffraction theory. We find that because of the different models and changes in the simulation parameters, the standing wave effects of CAB, and non-CAR behave differently. The simulation results show good agreement with the result's of a commercial tool.