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Dual spiral sandwiched magnetic thin film inductor using Fe-Hf-N soft magnetic films as a magnetic core

Authors
Kim, KHYoo, DWJeong, JHKim, JHan, SHKim, HJ
Issue Date
Feb-2002
Publisher
ELSEVIER SCIENCE BV
Keywords
magnetic thin film inductor; inductance; quality factor; thin film; DC/DC converter
Citation
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, v.239, no.1-3, pp.579 - 581
Indexed
SCIE
SCOPUS
Journal Title
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS
Volume
239
Number
1-3
Start Page
579
End Page
581
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/46833
DOI
10.1016/S0304-8853(01)00672-2
ISSN
0304-8853
Abstract
Dual spiral sandwiched magnetic thin film inductors are fabricated using as-deposited Fe-Hf-N soft magnetic thin films. The hard axis of the magnetic film is aligned transverse to the direction of coil conductor current, which is expected to result in high inductance values as well as excellent frequency response. The inductance, Q factor and resistance are measured using impedance analyzer from I to 10 MHz. The inductance of fabricated thin film inductors are obtained within the range of 1.1-1.5 muH. Also, the quality factor and coil resistance is obtained in the range of 3-38 at 8 MHz and 1-2.5 Ohm, respectively. (C) 2002 Elsevier Science B,V. All rights reserved.
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Kim, Jong ryoul
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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