Non-uniform multi-layer IC interconnect transmission line characterization for fast signal transient simulation of high-speed/high-density VLSI circuits

Abstract

A new IC interconnect transmission line parameter determination methodology and a novel fast simulation technique for non-uniform transmission lines are presented and verified. The capacitance parameter is a strong function of a shielding effect between the layers, while silicon substrate has a substantial effect on inductance parameter. Thus, they are taken into account to determine the parameters. Then the virtual straight-line-based per unit length parameters are determined in order to perform the fast transient simulation of the non-uniform transmission lines. It was shown that riot only the inductance effect due to a silicon substrate but also the shielding effect between the layers are too significant to be neglected. Further, a model order reduction technique is integrated into Berkeley SPICE in order to demonstrate that the virtual straight-line-based per-unit-length parameters can be efficiently employed for the fast transient response simulation of the complicated multilayer interconnect structures. Since the methodology is very efficient as well as accurate, it can Le usefully employed for IC CAD tools of high-performance VLSI circuit design.