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Advanced ALD processes: Electric field assisted ALD, discrete feeding method, and HCP enhanced ALD
- Authors
- 박태주
- Issue Date
- 11-Jul-2019
- Place
- 대한민국/서울 The-K호텔
- Conference Name
- 제2회 Atomic Craft Workshop
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Related Researcher
- Park, Tae Joo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)