다목적 특징 선택을 통한 반도체 제조공정에서의 불량탐지 방안

박세미; 안길승; 강창욱; 허선

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다목적 특징 선택을 통한 반도체 제조공정에서의 불량탐지 방안

Authors: 박세미; 안길승; 강창욱; 허선

Issue Date: Apr-2018

Publisher: 대한산업공학회

Citation: 대한산업공학회 춘계공동학술대회 논문집, pp.1662 - 1672

Indexed: OTHER

Journal Title: 대한산업공학회 춘계공동학술대회 논문집

Start Page: 1662

End Page: 1672

URI: https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/6327

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Appears in Collections: COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF INDUSTRIAL & MANAGEMENT ENGINEERING > 1. Journal Articles

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