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MBTA as a corrosion inhibitor to reduce defects in Cu CMP
- Authors
- 박진구
- Issue Date
- 22-Aug-2018
- Place
- Daejeon Convention Center, Daejeon, Korea
- Conference Name
- International Union of Materials Research Societies – International Conference on Electronic Materials 2018 (IUMRS-ICEM 2018)
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)