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Various interface sulfur passivation for atomic-layer-deposited gate oxide film on III-V compound semiconductors

Authors
박태주
Issue Date
21-Nov-2017
URI
https://scholarworks.bwise.kr/erica/handle/2021.sw.erica/8351
Place
제주도 라마다호텔
Conference Name
ICAE 2017
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COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers

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Park, Tae Joo
ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)
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