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Development of micro-spot spectroscopic ellipsometer using reflective objectives
- Authors
- 안일신; Park, Geonu; Park, Sungmo
- Issue Date
- Oct-2017
- Publisher
- Society for Semiconductor Devices (SSD)
- Keywords
- Spectroscopic; ellipsometer; micro-spot; reflective; objective
- Citation
- Invertis Journal of Science and Technology, v.10, no.3, pp.142 - 147
- Journal Title
- Invertis Journal of Science and Technology
- Volume
- 10
- Number
- 3
- Start Page
- 142
- End Page
- 147
- Abstract
- We developed a micro-spot spectroscopic ellipsometer using reflective objective, which has twomirrored Schwarzschild configuration. Using only small portion of numerical aperture and selecting off-axis illumination, we achieved spotsize of 60 micrometer in diameter. As the object is composed of mirrors, chromatic abberation was not a concern but reflection from mirrors caused polarization errors. We show details of the system including the effects of polarization errors.
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