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Qualitative and Quantitative Characterization of Cu Complex Layer in CMP
- Authors
- 박진구
- Issue Date
- 15-Aug-2017
- Place
- 미국, 뉴욕
- Conference Name
- 21st Interanational Symposium on Chemical-Mechanical Planarization
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Related Researcher
- Park, Jin Goo
- ERICA 공학대학 (DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING)