ScholarWorks@Hanyang University ERICA Campus: 2. Conference Papers

2. Conference Papers(COLLEGE OF ENGINEERING SCIENCES > DEPARTMENT OF MATERIALS SCIENCE AND CHEMICAL ENGINEERING > 2. Conference Papers)3,229

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Collection's Items (Sorted by Issue Date in Descending order): 3081 to 3100 of 3229

Removal of Submicron Particles Using Laser Shock Cleaning

ConferenceIssue Date2003PlaceSanta Clara, CA

The Adhesion and Removal of Silica Particles on Cu, TEOS, SiLK and TaN for Post-CMP Processes

ConferenceIssue Date2003PlaceSanta Clara, CA, USA

The Adhesion-induced Deformation of Micro and Nanoscale Particles

ConferenceIssue Date2003PlaceMyrtle Beach, SC, USA

Post CMP cleaning: from fundamentals to future direction

ConferenceIssue Date2003PlaceCOEX SEOUL

고 포화 자화 및 우수한 고주파 특성을 가진 나노결정 FeCoTaN 박막의 제조

ConferenceIssue Date2002Place용평리조트

수소환원을 이용한 Cu-Co 나노복합분말의 합성과 자기적 특성

ConferenceIssue Date2002Place한국기계연구원

Fabrication of Hydroxyapatite/Poly L-lactide Nanocomposite Biomaterials

ConferenceIssue Date2002PlaceHanyang Univ., Korea

Fabrication of Nano-sized Hydroxyapatite Powder by Spray Pyrolysis using an Ultrasonic Atomizer and Salt Assisted Decomposition

ConferenceIssue Date2002PlaceHanyang Univ., Korea

Si-O Containing Diamond-like Carbon Films Grown by PECVD

ConferenceIssue Date2002PlaceHanyang Univ., Korea

A new physical dry cleaning technique: Laser Shock cleaning

ConferenceIssue Date2002PlaceUSA, Boston

Nano particle adhesion and removal

ConferenceIssue Date2002PlaceUSA, Boston

The adhesion and removal of silica particles on Cu substrates during Cu CMP

ConferenceIssue Date2002PlaceUSA, Boston

Polyethylene/Clay Nanocomposite 제조를 위한 Clay에 담지된 Metallocene 촉매의 In-Situ 중합 연구

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ConferenceIssue Date2002Citation2002 한국공업화학회 추계 학술대회Publisher한국공업화학회Place한양대학교 안산

Laser 충격파를 이용한 실리콘 웨이퍼 표면에서의 미세 오염입자 제거

ConferenceIssue Date2002Place배재대학교

CU CMP Slurry의 첨가제에 따른 특성 평가

ConferenceIssue Date2002Place배재대학교

불화유기박막에 의한 마이크로몰드의 표면개질

ConferenceIssue Date2002Place배재대학교

CMP 공정 중 세라믹 컨디셔너의 물리적, 화학적 특성평가

ConferenceIssue Date2002Place배재대학교

화학기상응축 공정에 의한 중공구조의 beta-Fe2O3 나노분말의 합성

ConferenceIssue Date2002Place순천대학교

졸겔법을 이용한 Titanium Sillicate-1의 나노분말제조 및 형상제어

ConferenceIssue Date2002Place순천대학교

초음파분무열분해법에 의한 나노사이즈 하이드록시아파타이트 입자의 제조

ConferenceIssue Date2002Place순천대학교

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