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Diffusion and Defect Data Pt.B: Solid State Phenomena

Journal Title

  • Diffusion and Defect Data Pt.B: Solid State Phenomena

ISSN

  • P 1012-0394

Publisher

  • Scitec Publications Ltd.

Listed on(Coverage)

JCR 1999-2005
SCOPUS 2017-2020

Active

  • Inactive

Country

  • SWITZERLAND

Article List

1 - 6 out of 6 results.

SCOPUS
Atomic resolution quality control for Fin oxide recess by atomic resolution profilerGo to Link

Kim, Tae-Gon; Ryu, Heon-Yul; Kenis, Karine; Jo, Ah-Jin; Cho, Sang-Joon; Park, Sang-Il; Schmidt, Sebastian; Irmer, Bernd

ArticleIssue Date2016CitationSolid State Phenomena, v.255, pp.304 - 308PublisherTrans Tech Publications Ltd
Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study

Lee, Hun-Hee; Yun, Min-Sang; Lee, Hyun-Wook; Park, Jin-Goo

ConferenceIssue Date2013Place스위스
Removal of slurry residues in tungsten plug during chemical mechanical planarization

Yang, Chan Ki; Park, Jin-Goo; Jo, Jung-Hun; Lim, Geun-Sik; Kim, Tae-Hyung; Jo, In-Soo

ConferenceIssue Date2007Place스위스; Cheju Isl, SOUTH KOREA
SCOPUS
An efficient general purpose contact search algorithm using the relative coordinate system for multibody system dynamics

Cho, H.; Bae, D.; Choi, J.; Koo, J.C.

ArticleIssue Date2007CitationSolid State Phenomena, v.120, pp.129 - 134PublisherTrans Tech Publications Ltd
SCOPUS
An efficient general purpose contact search algorithm using the relative coordinate system for multibody system dynamics

Cho, H.; Bae, D.; Choi, J.; Koo, J.C.

ArticleIssue Date2007CitationSolid State Phenomena, v.120, pp.129 - 134PublisherTrans Tech Publications Ltd
SCOPUS
Effect of dissolved oxygen on removal of benzotriazole from co during a post-co cmp cleaningGo to Link

Ryu, Heon Yul; Jalalzai, Palwasha; Yerriboina, Nagendra Prasad; Kim, Tae Gon; Hamada, Satomi; Park, Jin Goo

ArticleIssue Date2021CitationSolid State Phenomena, v.314 SSP, pp 270 - 274PublisherTrans Tech Publications Ltd
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