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Removing W Polymer Residue from BEOL Structures using DSP+ (Dilute Sulfurec-Peroxide-HF) Mixture - A Case Study
- Authors
- Lee, Hun-Hee; Yun, Min-Sang; Lee, Hyun-Wook; Park, Jin-Goo
- Issue Date
- Jan-2013
- Conference Name
- Solid State Phenomena
- Place
- 스위스
- ISSN
- 1012-0394
1662-9779
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Collections - ETC > 2. Conference Papers
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Related Researcher
- Park, Jin Goo
- ERICA 첨단융합대학 (ERICA 신소재·반도체공학전공)