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H2/O2 확산화염 내 전기수력학적 방법에 의한 TEOS 주입시 비응집 입자형성에 관한 실험적 연구
안강호
Conference
Issue Date
2000
Citation
한국분말야금학회 2000년도 추계학술강연 및 발표회
Publisher
(사)한국분말야금학회
Place
선문대학교
KCI
OTHER
반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
Go to Link
안진홍; 강기태; 안강호
Article
Issue Date
2008
Citation
반도체디스플레이기술학회지, v.7, no.3, pp.29 - 34
Publisher
한국반도체디스플레이기술학회
전기수력학적 방법에 의한 입자 포집에 관한 연구
안강호
Conference
Issue Date
2001
Citation
열유체 공학부문 추계학술대회
Publisher
대한기계학회
Place
전북대학교
In-Situ Characterization of TiO2 Nanoparticle in Chemical Vapor Condensation Reactor
안강호
Conference
Issue Date
2000
Citation
5th International Conference on Nano structured Materials
Publisher
NANO2000
Place
Sendai, Japan
KCI
SMPS (Scanning Mobility Particle Sizer)를 이용한 안산지역 대기중 초미세입자 (30~500 nm) 분포연구
Go to Link
김용민; 안강호
Article
Issue Date
2005
Citation
한국대기환경학회지, v.21, no.3, pp.295 - 301
Publisher
한국대기환경학회
In situ Particle Monitoring(ISPM) System Development with Ion Counting Method and its Performance Evaluation in Vacuum Environment
안강호
Article
Issue Date
2006
Citation
7th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
Publisher
CUP
Electro-spray 방법을 이용한 초미세 입자의 하전특성에 관한 연구
안강호
Conference
Issue Date
2000
Citation
2nd Korean Conference on Aerosol and Particle Technology
Publisher
KAPAR
Place
용평리조트
A Numerical Study on Particle Growth in Chocked Capillary Nozzle Flow
안강호
Conference
Issue Date
2000
Citation
4th JSME-KSME Thermal Engineering Conference
Publisher
JSME
Place
Kobe, Japan
OTHER
진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가
Go to Link
안강호; 김용민; 권용택
Article
Issue Date
2006
Citation
한국반도체장비학회지, v.5, no.1, pp.45 - 49
Publisher
한국반도체장비학회
Charaterization of high flow rate water-based condensation particle counter for clean-room monitoring
안강호
Article
Issue Date
2007
Citation
The 5th Asian Aerosol Conference
Publisher
Asian Aerosol Conference
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권용택
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김용민
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윤진욱
3
정혁
3
Hidekuni Takao
2
Makoto Ishida
2
강기태
2
이영태
2
Kim, Yong-min
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Accumulation mode
1
Accuracy
1
Aitken nuclei mode
1
boundary layers
1
Brownian motion
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corona charging
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Deep RIE
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Deposition Chamber
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2009
21
2008
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Journal
한국입자에어로졸학회 학술대회 2009
10
2008년도 한국입자에어로졸학회 학술대회
7
사단법인 한국입자에어로졸학회, 2006년도 한국입자에어로졸학...
7
The 5th Asian Aerosol Conference
4
2007년도 한국입자에어로졸학회 학술대회 Proceeding
3
5th Korean conference on Aerosol ...
3
AAAR 27th Annual Conference
3
European Aerosol Conference 2008
3
The 4th Korean Conference on Aero...
3
한국대기환경학회 학술대회논문집
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scie
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scopus
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