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KCI
OTHER
반도체 공정용 차압식 질량 유량 제어 장치의 개발 및 성능 평가
Go to Link
안진홍; 강기태; 안강호
Article
Issue Date
2008
Citation
반도체디스플레이기술학회지, v.7, no.3, pp.29 - 34
Publisher
한국반도체디스플레이기술학회
KCI
SMPS (Scanning Mobility Particle Sizer)를 이용한 안산지역 대기중 초미세입자 (30~500 nm) 분포연구
Go to Link
김용민; 안강호
Article
Issue Date
2005
Citation
한국대기환경학회지, v.21, no.3, pp.295 - 301
Publisher
한국대기환경학회
In situ Particle Monitoring(ISPM) System Development with Ion Counting Method and its Performance Evaluation in Vacuum Environment
안강호
Article
Issue Date
2006
Citation
7th Japan-Korea Joint Workshop on Advanced Semiconductor Processes and Equipments
Publisher
CUP
OTHER
진공 환경내 실시간 입자 모니터링 시스템의 개발 및 성능평가
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안강호; 김용민; 권용택
Article
Issue Date
2006
Citation
한국반도체장비학회지, v.5, no.1, pp.45 - 49
Publisher
한국반도체장비학회
Charaterization of high flow rate water-based condensation particle counter for clean-room monitoring
안강호
Article
Issue Date
2007
Citation
The 5th Asian Aerosol Conference
Publisher
Asian Aerosol Conference
반도체공정 모니터링용 IPA Based 응축핵계수기의 개발 및 성능평가
안강호
Article
Issue Date
2006
Citation
사단법인 한국입자에어로졸학회, 2006년도 한국입자에어로졸학회 학술대회
Publisher
사단법인 한국입자에어로졸학회
Development and performance evaluation of soft X-ray chargers
안강호
Article
Issue Date
2007
Citation
The 5th Asian Aerosol Conference
Publisher
Asian Aerosol Conference
Real-time Observation of Deliquescence and Efflorescence Behaviour of lndividual Aerosol Particles
안강호
Article
Issue Date
2007
Citation
European Aerosol Conference 2007
Publisher
EAC
Synthesis of V205/Ti02 core-shell structure using electro-hydrodynamic spray
안강호
Article
Issue Date
2007
Citation
European Aerosol Conference 2007
Publisher
EAC
The development of condensation particle counter for Diesel engine exhaust particles
안강호
Article
Issue Date
2007
Citation
The 5th Asian Aerosol Conference
Publisher
Asian Aerosol Conference
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권용택
6
김용민
4
안진홍
4
윤진욱
3
정혁
3
Hidekuni Takao
2
Makoto Ishida
2
강기태
2
이영태
2
Kim, Yong-min
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Subject
Accumulation mode
1
Accuracy
1
Aitken nuclei mode
1
boundary layers
1
Brownian motion
1
corona charging
1
Deep RIE
1
Deposition Chamber
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Diaphragm
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Date Issued
2009
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2008
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2007
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2005
10
Language
Korean
14
English
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Journal
한국입자에어로졸학회 학술대회 2009
10
2008년도 한국입자에어로졸학회 학술대회
7
사단법인 한국입자에어로졸학회, 2006년도 한국입자에어로졸학...
7
The 5th Asian Aerosol Conference
4
2007년도 한국입자에어로졸학회 학술대회 Proceeding
3
European Aerosol Conference 2008
3
한국대기환경학회 학술대회논문집
3
6th Asian Aerosol Conference
2
6th Korean Conference on Aerosol ...
2
7th International Aerosol Conference
2
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kci
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scie
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scopus
2
kciCandi
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