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SCIESCOPUS

Photoinduced patterning of gold thin film Go to Link

An, Ilsin; Seong, Deokkyeong; Oh, Hyekeun

ArticleIssue Date2004CitationJapanese Journal of Applied Physics, v.43, no.8B, pp L1078 - L1080PublisherIOP Publishing Ltd

SCIESCOPUS

Angular dependency of off-axis illumination on 100-nm-width pattern printability for extreme ultraviolet lithography: Ru/Mo/Si reflector system Go to Link

Kang, In-Yong; Chung, Yong-Chae; Ahn, Jinho; Oh, Hye-Keun; Watanabe, Takeo; Kinoshita, Hiroo

ArticleIssue Date2004CitationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v.22, no.6, pp 2984 - 2986PublisherAmerican Institute of Physics

SCIESCOPUSKCI

Aerial image characterization for the defects in the extreme ultraviolet mask

Yoo, Myoung-Sul; Park, Seung-Wook; Kim, Ok-Kyung; Oh, Hye-Keun

ArticleIssue Date2004CitationJournal of the Korean Physical Society, v.45, no.5, pp 1218 - 1223Publisher한국물리학회

SCIESCOPUS

Aerial image characterization for the defects in the extreme ultraviolet mask Go to Link

Yoo, Myoung-Sul; Park, Seung-Wook; Kim, Jong-Hoi; Kwon, Yeong-Keun; Oh, Hye-Keun

ArticleIssue Date2004CitationProceedings of SPIE - The International Society for Optical Engineering, v.5374, no.PART 2, pp 751 - 759

SCIESCOPUS

Simulation benchmarking for the whole resist process Go to Link

Kim, Sang-Kon; Lee, Ji-Eun; Park, Seung-Wook; Yoo, Ji-Yong; Oh, Hye-Keun

ArticleIssue Date2004CitationProceedings of SPIE - The International Society for Optical Engineering, v.5378, pp 58 - 64PublisherSPIE

SCIESCOPUSKCI

A study of process parameter control for nanopattern Go to Link

Kim, Sang-Kon; OH, HYE KEUN

ArticleIssue Date2004CitationJournal of the Korean Physical Society, v.45, no.S(suppl.), pp S736 - S739Publisher한국물리학회

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