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Dependence of device performances on fin dimensions in AlGaN/GaN recessed-gate nanoscale FinFET

Authors
Yoo, G.M.Seo, J.H.Yoon, Y.J.Kim, Y.J.Kim, S.Y.Kang, H.S.Eun, H.R.Kwon, R.H.Jang, Y.I.Kang, I.M.Lee, S.M.Cho, S.
Issue Date
2014
Publisher
Institute of Electrical and Electronics Engineers Inc.
Keywords
3-D TCAD; fin design; fin-shaped channel; FinFET; GaN; heterostructures; power transistor; recessed gate
Citation
Proceedings of the International Symposium on Consumer Electronics, ISCE
Journal Title
Proceedings of the International Symposium on Consumer Electronics, ISCE
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/13040
DOI
10.1109/ISCE.2014.6884475
ISSN
0000-0000
Abstract
In this work, dependence of device performances on AlGaN/GaN heterostructure recessed-gate fin-shaped-channel field-effect transistor (FinFET), as a power transistor, on the fin dimensions is closely investigated. On-state (Ion) and off-state (Ioff) currents are affected by fin geometry and the former showed a more drastic change (250∼1209 mA/mm) compared with the latter (confined to ∼1×10-12 mA/mm order). The design works have been conducted through a three-dimensional (3-D) technology computer-aided design (TCAD). © 2014 IEEE.
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