Double-Gate Junctionless 1T DRAM with Physical Barriers for Retention Improvement

Abstract

In this article, a double-gate (DG) junctionless (JL) transistor with physical barriers is proposed for one-transistor dynamic random-access memory (1T DRAM) application. In this topology, the holes are stored in the region blocked by physical barriers constructed by oxides underneath the source and drain regions rather than a potential well formed by n+-p-n+ as in the conventional structures. The proposed topology achieves an elongated retention time ( {T}_{\text {ret}} ) with larger physical barrier thickness ( {T}_{\text {oxPB}} ) and wider barrier offset length ( {L}_{\text {BO}} ) due to a reduction in band-to-band tunneling (BTBT) (during hold '0') and recombination (during hold '1'). Maximum retention times of 2.5 s and 33 ms have been achieved for channel doping of 1019 cm-3 at 27 °C and 85 °C, respectively, with gate length ( {L}_{g} ) of 100 nm at small drain bias ( {V}_{\text {DS}} ) of 1 V during write '1.' Results demonstrate a better gate length scalability and a retention time of 4 ms at {L}_{g} of 15 nm with thinner Si channel thickness under the gate ( {T}_{\text {Si}} ) and thicker {T}_{\text {oxPB}}. In addition, the effect of temperature on retention time has been analyzed. With optimized {T}_{\text {oxPB}} at {L}_{g} = {100} nm, the retention time decreases due to thermal generation and recombination from 2.5 s at 27 °C to 3 ms at 125 °C. © 1963-2012 IEEE.