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O2-Enhanced Surface Treatment of Ge Epitaxially Grown on Si for Heterogeneous Ge Technology

Authors
조성재
Issue Date
24-Jun-2014
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/29045
Conference Name
Proceedings of 2014 ISCE
Place
미국
Jeju, Republic of Korea
metadata.conference.dc.citation.conferenceName
2014 The 18th IEEE International Symposium on Consumer Electronics (ISCE)
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IT (Major of Electronic Engineering)
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