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Preparation of multi-component thin film by facing target sputtering systemPreparation of multi-component thin film by facing target sputtering system
- Alternative Title
- Preparation of multi-component thin film by facing target sputtering system
- Authors
- 김경환
- Issue Date
- 20-Aug-2010
- Place
- South Korea
무창포 비체팰리스
- metadata.conference.dc.citation.conferenceName
- 제39회 한국진공학회 하계정기학술대회
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Collections - IT융합대학 > 전기공학과 > 2. Conference Papers
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Related Researcher
- Kim, Kyung Hwan
- College of IT Convergence (Department of Electrical Engineering)