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Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry EtchFabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- Alternative Title
- Fabracatioin of Sputtered Mo Gated Silicon Field Emitter Arrays by using the Condition of Silicon Dry Etch
- Authors
- 조의식
- Issue Date
- 14-Nov-2007
- Place
- 일본
Tokyo International Exchange Center, Tokyo
- metadata.conference.dc.citation.conferenceName
- 29th International Symposium on Dry Process
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Collections - IT융합대학 > 전자공학과 > 2. Conference Papers
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