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Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering methodPreparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method

Alternative Title
Preparation of ITO thin film on flexible polymer substrate by using facing targets sputtering method
Authors
김경환
Issue Date
21-Oct-2006
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/36678
Place
South Korea
해운대그랜드호텔,부산
metadata.conference.dc.citation.conferenceName
The 6th Korea-Japan Symposium on Plasma and Thin Film Technology
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College of IT Convergence (Department of Electrical Engineering)
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