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Characteristics of Phosphorus lmplanted Mold Type Diamond FEAs

Authors
권상직
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/37909
Conference Name
Joint International Plasma Symposium of 6th APCPST, 15th SPSM, OS 2002 & 11th KAPRA
Place
대한민국
metadata.conference.dc.citation.conferenceName
6th APCPST(Asia Pacific Conference on Plasma Science and Technology)
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IT융합대학 > 전자공학과 > 2. Conference Papers

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반도체대학 (반도체·전자공학부)
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