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대향타겟식 스퍼터법에 의한 ZnO:Al 박막의 제작

Authors
김경환
URI
https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/38466
Conference Name
한국진공학회 제20회 학술발표회
Place
South Korea
metadata.conference.dc.citation.conferenceName
한국진공학회
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IT융합대학 > 전기공학과 > 2. Conference Papers

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Kim, Kyung Hwan
College of IT Convergence (Department of Electrical Engineering)
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