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스핀 스프레이법으로 PC 기판에 제작한 산화아연 박막의 특성Property of Spin-sprayed ZnO Film on PC Substrate
- Other Titles
- Property of Spin-sprayed ZnO Film on PC Substrate
- Authors
- 홍정수; Nobuhiro Matsushita; Ken-ichi Katsumata; 박용서; 김경환
- Issue Date
- 2018
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Spin-spray; ZnO; Transparent electrode; UV; Conductivity
- Citation
- 반도체디스플레이기술학회지, v.17, no.3, pp.27 - 30
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 17
- Number
- 3
- Start Page
- 27
- End Page
- 30
- ISSN
- 1738-2270
- Abstract
- In this study, ZnO film was deposited on polycarbonate substrate by spin-spray method at low substrate temperature of 85oC. Surface morphology of ZnO films was changed by adding citrate from rod to dense structure. As-deposited ZnO film indicated high transmittance above 80%. In case of the resistivity, as-deposited ZnO film had high resistivity due to the existence of organic substance in the film. However, organic substance was removed and resistivity was decreased to 3.9 x 10-2 Ω·cm, after UV irradiation.
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Collections - IT융합대학 > 전기공학과 > 1. Journal Articles
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Related Researcher
- Kim, Kyung Hwan
- College of IT Convergence (Department of Electrical Engineering)