3차원 FDTD 방법에 의한 ITO/Ag/ITO 다층 투명전극막의 투과도 시뮬레이션Simulations of Transmittance for the ITO/Ag/ITO Multiple Transparent Electrode Layers by 3 Dimensional FDTD method
- Other Titles
- Simulations of Transmittance for the ITO/Ag/ITO Multiple Transparent Electrode Layers by 3 Dimensional FDTD method
- Authors
- 김기락; 조의식; 권상직
- Issue Date
- Sep-2020
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Transparent conductive oxide; ITO/Ag/ITO; FDTD; Wave optics; 3D simulation
- Citation
- 반도체디스플레이기술학회지, v.19, no.3, pp.88 - 92
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 19
- Number
- 3
- Start Page
- 88
- End Page
- 92
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/78333
- ISSN
- 1738-2270
- Abstract
- As a highly conductive and transparent electrode, the optical transmittances of ITO/Ag/ITO were simulated and compared with the experimental results. The simulations are based on the finite-difference time-domain (FDTD) method in solving linear Maxwell equations. In our simulations, the computation domain is set in the XZ-plane with 3D dimension, and a plane wave with variable wavelengths ranging from 250 nm to 850 nm is incident in the z-direction at normal incidence to the ITO/Ag/ITO film surrounded by free-air space. As the results through both simulations and experiments, it was shown that the thickness combinations by the ITO layers of about 40 nm and the Ag layer of about 10 nm could be most suitable conditions as a high conductive transparent electrode having the transmittance similar to that of a single ITO layer.
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