Three-dimensional Modeling for the Transmittance of ITO/Mesh-Ag/ITO Multilayers using FDTD
- Authors
- Cho, Eou-Sik; Kwon, Sang Jik
- Issue Date
- Oct-2021
- Publisher
- 대한전자공학회
- Keywords
- Transparent conductive oxide; mesh structure; ITO/mesh-Ag/ITO multiple layer; full-wave simulation; 3D FDTD method
- Citation
- JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE, v.21, no.5, pp.348 - 355
- Journal Title
- JOURNAL OF SEMICONDUCTOR TECHNOLOGY AND SCIENCE
- Volume
- 21
- Number
- 5
- Start Page
- 348
- End Page
- 355
- URI
- https://scholarworks.bwise.kr/gachon/handle/2020.sw.gachon/83045
- DOI
- 10.5573/JSTS.2021.21.5.348
- ISSN
- 1598-1657
- Abstract
- In order to improve the transmittance of ITO/Ag/ITO multilayers, Ag layer was formed with mesh structure. For more accurate and practical analysis, we performed the simulations using an optical wave simulator termed the full-wave simulation program. In our simulations, the three dimensional (3D) finite-difference time-domain (FDTD) method was used to realize the high density mesh structure, and a plane wave with variable wavelengths ranging from 250 to 850 nm is incident in the z-direction at normal incidence to the ITO/Mesh-Ag/ITO film surrounded by free-air space. From the simulation results, at a higher open ratio and lower Ag thickness, the transmittance of ITO/Mesh-Ag/ITO were not influenced by other parameters. Experimental measurements were performed depending on the various Ag mesh-spaces and mesh-widths. The open ratio of about 60 % has shown the acceptable results in the points of both the optical transmittance and the electrical conductance.
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