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EUV reflectometry and scatterometry for thin layer and periodic structure characterization Go to Link

Shen, Tao; Mochi, Iacopo; Ansuinelli, Paolo; Jeong, Dongmin; Ahn, Jinho; Ekinci, Yasin

ArticleIssue Date2024CitationMETROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII, v.12955, pp 1 - 9PublisherSPIE-INT SOC OPTICAL ENGINEERING

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Impact of Sn Particle-Induced Mask Diffraction on EUV Lithography Performance Across Different Pattern Types Go to Link open access

Moon, Seungchan; Lee, Dong Gi; Choi, Jinhyuk; Hong, Junho; Lee, Taeho; Ekinci, Yasin; Ahn, Jinho

ArticleIssue Date2025CitationPhotonics, v.12, no.3, pp 1 - 13PublisherMDPI AG

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Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank Go to Link

Shen, Tao; Mochi, Iacopo; Jeong, Dongmin; Mueller, Elisabeth; Ansuinelli, Paolo; Ahn, Jinho; Ekinci, Yasin

ArticleIssue Date2024CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.23, no.4, pp 1 - 12PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Spectral reflectometry characterization of an extreme ultraviolet attenuated phase-shifting mask blank (vol 23, 041402, 2024)Go to Link

Shen, Tao; Mochi, Iacopo; Jeong, Dongmin; Mueller, Elisabeth; Ansuinelli, Paolo; Ahn, Jinho; Ekinci, Yasin

ArticleIssue Date2024CitationJournal of Micro/ Nanolithography, MEMS, and MOEMS, v.23, no.4, pp 1 - 2PublisherSPIE - International Society for Optical Engineering

SCIESCOPUS

Ultralow line edge roughness of hybrid multilayer Extreme ultraviolet resist with vertical molecular wire structure Go to Link

Lee, Jaehyuk; Ji, Hyeonseok; Koh, Chawon; Lee, Juyeong; Seok, Ji-Hoo; Ahn, Jinho; Kim, Chang Gyoun; Kim, Jiho; Hwang, Inhui; Ahn, Hyungju, et al.

ArticleIssue Date2025CitationMATERIALS TODAY, v.87, pp 20 - 28PublisherELSEVIER SCI LTD

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Browsing by Ekinci, YasinAuthor

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