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SCIESCOPUS
(111) Faceted Ceria and Its Influence on STI CMP for Memory Devices Below 50 nmGo to Link

Kim, Ye-Hwan; Kim, Jong-Woo; Watanabe, Akira; Naito, Makio; Paik, Ungyu

ArticleIssue Date2009CitationElectrochemical and Solid-State Letters, v.12, no.12, pp H449 - H452PublisherElectrochemical Society, Inc.
SCISCIESCOPUS
Ceria CMP Slurry for the Construction of Floating Gates in MLC NAND Flash Memory below 51 nmGo to Link

Kim, Ye-Hwan; Kim, Jong-Woo; Kim, Sang-Kyun; Paik, Ungyu

ArticleIssue Date2010CitationElectrochemical and Solid-State Letters, v.13, no.10, pp H339 - H342PublisherElectrochemical Society, Inc.
SCIESCOPUS
Constraints of the Corning on Plugs of W Film in W Chemical Mechanical PlanarizationGo to Link

Kim, Ye-Hwan; Hong, Gisik; Kim, Jong-Woo; Kim, Sang-Kyun; Kim, Namsoo; Yi, Dong Kee; Paik, Ungyu

ArticleIssue Date2009CitationElectrochemical and Solid-State Letters, v.12, no.6, pp H218 - H221PublisherElectrochemical Society, Inc.
SCIESCOPUS
Constraints on removal of Si3N4 film with conformation-controlled poly(acrylic acid) in shallow-trench isolation chemical-mechanical planarization (STI CMP)Go to Link

Kim, Ye-Hwan; Lee, Seung-Mi; Lee, Kee-June; Paik, Ungyu; Park, Jea-Gun

ArticleIssue Date2008CitationJournal of Materials Research, v.23, no.1, pp 49 - 54PublisherMaterials Research Society
SCIESCOPUS
Crystalline structure of ceria particles controlled by the oxygen partial pressure and STI CMP performancesGo to Link

Kim, Ye-Hwan; Kim, Sang-Kyun; Kim, Namsoo; Park, Jea-Gun; Paik, Ungyu

ArticleIssue Date2008CitationUltramicroscopy, v.108, no.10, pp 1292 - 1296PublisherElsevier BV
SCIESCOPUS
High-Removal Selectivity Through Interaction Between Polyacrylamide and SiO2 Film in Poly Isolation Chemical Mechanical PlanarizationGo to Link

Kim, Ye-Hwan; Lee, Kee-June; Park, Jea-Gun; Paik, Ungyu

ArticleIssue Date2009CitationJournal of Nanoscience and Nanotechnology, v.9, no.6, pp 3780 - 3784PublisherAmerican Scientific Publishers
SCISCIESCOPUS
Increase in the Adsorption Density of Anionic Molecules on Ceria for Defect-Free STI CMPGo to Link

Kim, Ye-Hwan; Kim, Sang-Kyun; Park, Jea-Gun; Paik, Ungyu

ArticleIssue Date2010CitationJournal of the Electrochemical Society, v.157, no.1, pp H72 - H77PublisherElectrochemical Society, Inc.
SCISCIESCOPUS
Non-Prestonian Behavior of Rectangular Shaped Ceria Slurry in Shallow Trench Isolation Chemical Mechanical PlanarizationGo to Link

Kim, Ye-Hwan; Jung, Yeon-Gil; Yoon, Gwang Seob; Moon, Jinok; Watanabe, Akira; Naito, Makio; Paik, Ungyu

ArticleIssue Date2012CitationJournal of Nanoscience and Nanotechnology, v.12, no.3, pp 2810 - 2814PublisherAmerican Scientific Publishers
SCIESCOPUS
The Effect of the physico-chemical properties of cellulosic polymers on the Si wafer polishing processGo to Link

Kim, Sang-Kyun; Kim, Ye-Hwan; Paik, Ungyu; Katoh, Takeo; Park, Jea-Gun

ArticleIssue Date2006CitationJournal of Electroceramics, v.17, no.2-4, pp 835 - 839PublisherKluwer Academic Publishers
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