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Showing results 1 to 16 of 16

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Comparison of plasma densities measured by using electrical probes to those measured by using microwave probes in inductively coupled plasmas

Kim, Won-Ki; Lee, Min-Hyong; Chung, Chin-Wook; Kim, Jung-Hyung

ArticleIssue Date2006CitationJournal of the Korean Physical Society, v.49, no.4, pp 1687 - 1690Publisher한국물리학회
SCISCIESCOPUS
Comparison of pressure dependence of electron energy distributions in oxygen capacitively and inductively coupled plasmasGo to Link

Lee, Min-Hyong; Lee, Hyo-Chang; Chung, Chin-Wook

ArticleIssue Date2010CitationPhysical Review E - Statistical, Nonlinear, and Soft Matter Physics, v.81, no.4, pp 1 - 6PublisherAmerican Physical Society
SCISCIESCOPUS
Effect of adding small amount of inductive fields to O-2, Ar/O-2 capacitively coupled plasmasGo to Link

Lee, Min-Hyong; Lee, Hyo-Chang; Chung, Chin-Wook

ArticleIssue Date2012CitationJournal of Applied Physics, v.111, no.9, pp 1 - 4PublisherAmerican Institute of Physics
SCISCIESCOPUS
Effects of rf-bias power on plasma parameters in a low gas pressure inductively coupled plasmaGo to Link

Lee, Hyo-Chang; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2010CitationApplied Physics Letters, v.96, no.7, pp 1 - 3PublisherAmerican Institute of Physics
SCIESCOPUS
Electron temperature control by an external magnetic field in solenoidal inductive dischargeGo to Link

Lee, Min-Hyong; Ku, Ju-Hwan; Hwang, Kwang-Tae; Chung, Chin-Wook

ArticleIssue Date2009CitationPhysics of Plasmas, v.16, no.6, pp 1 - 5PublisherAmerican Institute of Physics
SCIESCOPUS
Experimental measurement of the total energy losses in a low pressure inductively coupled argon plasmaGo to Link

Lee, Young-Kwang; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2009CitationApplied Physics Letters, v.95, no.11, pp 1 - 3PublisherAmerican Institute of Physics
SCISCIESCOPUS
Experimental observation of the transition from nonlocal to local electron kinetics in inductively coupled plasmasGo to Link

Lee, Hyo-Chang; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2010CitationApplied Physics Letters, v.96, no.4, pp 1 - 3PublisherAmerican Institute of Physics
SCISCIESCOPUS
Experimental Verification of the Optimal FDBs in a HDD Spindle Motor to Minimize Power LossGo to Link

Lee, Joung-Han; Lee, Min-Hyong; Jang, Gunhee

ArticleIssue Date2013CitationIEEE Transactions on Magnetics, v.49, no.6, pp 2437 - 2440PublisherInstitute of Electrical and Electronics Engineers
SCIESCOPUSKCI
Langmuir Probe Perturbation in Inductively Coupled PlasmasGo to Link

Jang, Sung-Ho; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2009CitationJournal of the Korean Physical Society, v.55, no.5, pp 1869 - 1872Publisher한국물리학회
SCISCIESCOPUS
Low energy electron heating and evolution of the electron energy distribution by diluted O-2 in an inductive Ar/O-2 mixture dischargeGo to Link

Lee, Hyo-Chang; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2010CitationPhysics of Plasmas, v.17, no.1, pp 1 - 5PublisherAmerican Institute of Physics
SCIESCOPUS
Noninvasive method to measure the ion flux in capacitive dischargeGo to Link

Lee, Min-Hyong; Lee, Hyo-Chang; Chung, Chin-Wook

ArticleIssue Date2007CitationApplied Physics Letters, v.91, no.22, pp 1 - 4PublisherAmerican Institute of Physics
SCIESCOPUS
Observation of collisionless heating of low energy electrons in low pressure inductively coupled argon plasmasGo to Link

Lee, Min-Hyong; Lee, Hyo-Chang; Chung, Chin-Wook

ArticleIssue Date2008CitationApplied Physics Letters, v.93, no.23, pp 1 - 3PublisherAmerican Institute of Physics
SCISCIESCOPUS
Observation of inverse hysteresis in the E to H mode transitions in inductively coupled plasmasGo to Link

Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2010CitationPlasma Sources Science and Technology, v.19, no.1, pp 1 - 6PublisherInstitute of Physics Publishing
SCIESCOPUS
Observation of the inductive to helicon mode transition in a weakly magnetized solenoidal inductive dischargeGo to Link

Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2008CitationApplied Physics Letters, v.93, no.15, pp 1 - 3PublisherAmerican Institute of Physics
SCIESCOPUS
On the multistep ionizations in an argon inductively coupled plasmaGo to Link

Lee, Min-Hyong; Jang, Sung-Ho; Chung, Chin-Wook

ArticleIssue Date2006CitationPhysics of Plasmas, v.13, no.5, pp 1 - 7PublisherAmerican Institute of Physics
SCIESCOPUSKCI
Spectroscopic measurement of the electron temperature and the metastable densities by using a simple collisional-radiative model in a low-pressure inductively-coupled argon plasmaGo to Link

Lee, Young-Kwang; Hwang, Kwang-Tae; Lee, Min-Hyong; Chung, Chin-Wook

ArticleIssue Date2008CitationJournal of the Korean Physical Society, v.52, no.6, pp 1792 - 1799Publisher한국물리학회
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