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Browsing by Park, Chang-KyunAuthor

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SCIESCOPUS
Cocktail Precursor Approach for Homogeneous ALD InGaO Film Growth Overcoming Limits of Mobility–Reliability Trade-Off in Oxide Semiconductors

Ryu, Seong-Hwan; Kim, Dong-Gyu; Koo, Haklim; Yeom, Kyuhyun; Ryu, Dae Won; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2026CitationACS Applied Materials and Interfaces, v.18, no.4, pp 7148 - 7158PublisherAmerican Chemical Society
SCIESCOPUSKCI
Compositionally engineered amorphous InZnO thin-film transistor with high mobility and stability via atmospheric pressure spatial atomic layer depositionGo to Link

Lee, Chi-Hoon; Yoo, Kwang Su; Kim, Dong-Gyu; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationJournal of Industrial and Engineering Chemistry, v.140, pp 269 - 276Publisher한국공업화학회
SCIESCOPUS
High mobility and productivity of flexible In2O3 thin-film transistors on polyimide substrates via atmospheric pressure spatial atomic layer depositionGo to Link

Yoo, Kwang Su; 이치훈; 김동규; Choi, Su-Hwan; 이원범; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationApplied Surface Science, v.646, pp 1 - 9PublisherElsevier BV
SCIESCOPUS
High-temperature interfacial stability of In2O3 FETs with SiO2 versus Al2O3 insulators enabling 3 nm channel scalingGo to Link

Oh, Hye-Jin; Lee, Jun-Yeoub; Beom, Jun Young; Sun, Ji Eun; Lee, Chi-Hoon; Park, Chang-Kyun; Kim, Duho; Kim, Minhyuk; Lee, Junseok; Cho, Seunghyun, et al.

ArticleIssue Date2026CitationApplied Surface Science, v.730, pp 1 - 6PublisherElsevier B.V.
SCIESCOPUS
Hydrogen-State-Engineered Oxide Semiconductor Channels Enabling Reliable 2T0C DRAM OperationGo to Linkopen access

Lee, Jun-Yeoub; Hwang, Taewon; Choi, Su-Hwan; Oh, Hye-Jin; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2026CitationADVANCED ELECTRONIC MATERIALS, v.12, no.11, pp 1 - 9PublisherWILEY
SCIESCOPUS
Impact of hydrogen-controlled thermal ALD SiO2 insulators on IGZO channel FETs to optimize the electrical performanceGo to Linkopen access

Choi, Su-Hwan; Kim, Dong-Gyu; Kwag, Jae-Hyeok; Song, Ki-Cheol; Lee, Yeonhee; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationJournal of Materials Chemistry C, v.13, no.12, pp 6215 - 6223PublisherRoyal Society of Chemistry
SCIESCOPUS
Reduction of trap density in high-k dielectrics through optimized ALD process and high-pressure deuterium annealing

Hwang, Taewon; Choi, Su-Hwan; Song, Ki-Cheol; Lee, Yeonhee; Kwag, Jae-Hyeok; Lee, Jun-Yeoub; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationMaterials Science in Semiconductor Processing, v.191, pp 1 - 8PublisherPergamon Press
SCIESCOPUS
Synthesis of low-k SiONC thin films by plasma-assisted molecular layer deposition with tetraisocyanatesilane and phloroglucinolGo to Link

Park, Gi-Beom; Yang, Hae Lin; Kim, Ji Min; Jung, Hyolim; Baek, Geonho; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2024CitationNanotechnology, v.35, no.40, pp 1 - 10PublisherInstitute of Physics Publishing
SCIESCOPUS
Tailoring the number of lines for IGO-channel 2T0C DRAM comparable to conventional 2-line operation 1T1C structure for highly scaled cell volumeGo to Linkopen access

Kwag, Jae-Hyeok; Choi, Su-Hwan; Kim, Daejung; Lee, Jun-Yeoub; Hwang, Taewon; Oh, Hye-Jin; Park, Chang-Kyun; Park, Jin-Seong

ArticleIssue Date2025CitationInternational Journal of Extreme Manufacturing, v.7, no.5, pp 1 - 11PublisherIOP Publishing
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