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Coherent scattering microscopy as an effective inspection tool for analyzing performance of phase shift maskGo to Link

Woo, Dong Gon; Lee, Jae Uk; Hong, Seong Chul; Kim, Jung Sik; Ahn, Jinho

ArticleIssue Date2016CitationOptics Express, v.24, no.11, pp 2055 - 2062PublisherOptical Society of America
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Impact of EUV Pellicle Transmittance on Imaging Performance Analyzed by Coherent Scattering MicroscopyGo to Link

Woo, Dong Gon; Hong, Seongchul; Cho, Han Ku; Ahn, Jinho

ArticleIssue Date2016CitationNanoscience and Nanotechnology Letters, v.8, no.7, pp 615 - 619PublisherAmerican Scientific Publishers
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Nickel and Nickel Oxide Thin Films as Absorber Layer Materials of Extreme Ultraviolet MasksGo to Link

Woo, Dong Gon; Kim, Jung Sik; Hong, Seongchul; Ahn, Jinho

ArticleIssue Date2017CitationNanoscience and Nanotechnology Letters, v.9, no.1, pp 20 - 23PublisherAmerican Scientific Publishers
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그림자 효과 완화 및 내화학성 향상을 위한 탄탈륨-니켈 화합물 극자외선 흡수체

Woo, Dong Gon; Hong, Seongchul; Kim, Jung Sik; Yang, Chul Kyu; Lee, Jong Hwa; Shin, Chul; Ahn, Jinho

ArticleIssue Date2016Citation대한금속·재료학회지, v.54, no.7, pp 546 - 551Publisher대한금속·재료학회
SCIESCOPUSKCI
새로운 EUV 흡수체 연구：니켈 & 니켈 산화물Go to Link

Woo, Dong Gon; Kim, Jung Hwan; Kim, Jung Sik; Hong, Seongchul; Ahn, Jinho

ArticleIssue Date2017Citation대한금속·재료학회지, v.55, no.3, pp 198 - 201Publisher대한금속·재료학회
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