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Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge
- Authors
- 정진욱
- Issue Date
- 28-Oct-2019
- Publisher
- American Physical Society
- Citation
- The 72nd Annual Gaseous Electronics Conference
- Conference Name
- The 72nd Annual Gaseous Electronics Conference
- Place
- Texas A&M Hotel
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)