Y Super fine cerium hydroxide abrasives for-SiO2 film chemical mechanical planarization performing scratch freeopen access
- Authors
- Son, Young-Hye; Jeong, Gi-Ppeum; Kim, Pil-Su; Han, Man-Hyup; Hong, Seong-Wan; Bae, Jae-Young; Kim, Sung-In; Park, Jin-Hyung; Park, Jea-Gun
- Issue Date
- Sep-2021
- Publisher
- NATURE PORTFOLIO
- Citation
- Scientific Reports, v.11, no.1, pp.1 - 10
- Indexed
- SCIE
SCOPUS
- Journal Title
- Scientific Reports
- Volume
- 11
- Number
- 1
- Start Page
- 1
- End Page
- 10
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/141144
- DOI
- 10.1038/s41598-021-97122-9
- ISSN
- 2045-2322
- Abstract
- Face-centered-cubic crystallized super-fine (= 2 nm in size) wet-ceria-abrasives are synthesized using a novel wet precipitation process that comprises a Ce4+ precursor, C3H4N2 catalyst, and NaOH titrant for a synthesized termination process at temperature of at temperature of 25 degrees C. This process overcomes the limitations of chemical-mechanical-planarization (CMP)-induced scratches from conventional dry ceria abrasives with irregular surfaces or wet ceria abrasives with crystalline facets in nanoscale semiconductor devices. The chemical composition of super-fine wet ceria abrasives depends on the synthesis termination pH, that is, Ce(OH)(4) abrasives at a pH of 4.0-5.0 and a mixture of -CeO2 and Ce(OH)(4) abrasives at a pH of 5.5- 6.5. The Ce(OH)(4) abrasives demonstrate better abrasive stability in the SiO2-film CMP slurry than the CeO2 abrasives and produce a minimum abrasive zeta potential (similar to 12 mV) and a minimum secondary abrasive size (similar to 130 nm) at the synthesis termination pH of 5.0. Additionally, the abrasive stability of the SiO2-film CMP slurry that includes super-fine wet ceria abrasives is notably sensitive to the CMP slurry pH; the best abrasive stability (i.e., a minimum secondary abrasive size of similar to 130 nm) is observed at a specific pH (6.0). As a result, a maximum SiO2 film polishing rate (similar to 524 nm/ min) is achieved at pH 6.0, and the surface is free of stick-and-slip type scratches.
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