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MgO-Al2O3-SiO2계 유리의 열물성과 내플라즈마성 연구Study on thermal properties and plasma resistance of MgO-Al2O3-SiO2 glass
- Other Titles
- Study on thermal properties and plasma resistance of MgO-Al2O3-SiO2 glass
- Issue Date
- Jun-2021
- Publisher
- 한국반도체디스플레이기술학회
- Keywords
- Plasma resistance; Plasma etching; Alkaline-earth glass; DOE(Design Of Experiments)
- Citation
- 반도체디스플레이기술학회지, v.20, no.2, pp 61 - 66
- Pages
- 6
- Indexed
- KCI
- Journal Title
- 반도체디스플레이기술학회지
- Volume
- 20
- Number
- 2
- Start Page
- 61
- End Page
- 66
- ISSN
- 1738-2270
- Abstract
- In this study, we studied the alternative of plasma resistant ceramic parts that constitute plasma chambers in the semiconductor dry etching process. MgO-Al2O3-SiO2(MAS) glass was made of 13 types of glass using the Design Of Experiments(DOE) and the effect on thermal properties such as glass transition temperature and crystallization temperature depending on the content of each composition and etching resistance to CF4/O2/Ar plasma gas. MAS glass showed excellent plasma resistance and surface roughness up to 20 times higher than quartz glass. As the content of Al2O3 and MgO increases, the plasma resistance is improved, and it has been confirmed that it has an inverse relationship with SiO2.
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Collections - 서울 공과대학 > 서울 신소재공학부 > 1. Journal Articles
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Related Researcher
- Im, Won Bin
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)