Correlation between vibrational temperature of N-2 and plasma parameters in inductively coupled Ar/N-2 plasmas
- Authors
- Kim, Young-Cheol; Lee, Hyo-Chang; Kim, Yu-Sin; Chung, Chin-Wook
- Issue Date
- Aug-2015
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.22, no.8, pp.1 - 7
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 22
- Number
- 8
- Start Page
- 1
- End Page
- 7
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/143409
- DOI
- 10.1063/1.4928907
- ISSN
- 1070-664X
- Abstract
- Vibrational temperature (T-vib) of N-2 gas and electron energy distribution function (EEDF) were measured in Ar/N-2 mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density n(p) and T-vib (from 7000K to 5600 K) slightly decrease. However, remarkable decrease in n(p) and T-vib is found with the dilution of N-2 gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while n(p) is little changed with the dilution of N-2 gas. In this case, T-vib slightly decreases from 9500 K to 7600 K. These results indicate that the variation of T-vib is strongly correlated to the plasma parameters, such as the plasma density and EEDF.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/143409)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.