Electrical Features of an Amorphous Indium-Gallium-Zinc-Oxide Film Transistor Using a Double Active Matrix with Different Oxygen Contents
- Authors
- Koo, Ja Hyun; Kang, Tae Sung; Hong, Jin Pyo
- Issue Date
- May-2012
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- IGZO TFT; Double active layer; Oxygen vacancy
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.60, no.9, pp.1386 - 1389
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 60
- Number
- 9
- Start Page
- 1386
- End Page
- 1389
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/144771
- DOI
- 10.3938/jkps.60.1386
- ISSN
- 0374-4884
- Abstract
- The electrical characteristics of amorphous indium-gallium-zinc-oxide (a-IGZO) thin film transistors (TFTs) are systematically studied using a double a-IGZO active layer that is composed of a-IGZO(x) (oxygen-ion-poor region) and a-IGZO(y) (oxygen-ion-rich-region). An active layer is designed to have a serially-stacked bi-layer matrix with different oxygen contents, providing the formation of different electron conduction channels. Two different oxygen contents in the active layer are obtained by varying the O-2 partial pressure during sputtering. The a-IGZO TFT based on a double active layer exhibits a high mobility of 9.1 cm(2)/Vsec, a threshold voltage (V-T) of 16.5 V, and Delta V-T shifts of less than 1.5 V under gate voltage stress. A possible electrical sketch for the double active layer channel is also discussed.
- Files in This Item
-
Go to Link
- Appears in
Collections - 서울 자연과학대학 > 서울 물리학과 > 1. Journal Articles
![qrcode](https://api.qrserver.com/v1/create-qr-code/?size=55x55&data=https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/144771)
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.