Pulsed floating-type Langmuir probe for measurements of electron energy distribution function in plasmas
- Authors
- Choi, Ikjin; Kim, Aram; Lee, Hyo-Chang; Kim, Dong-Hwan; Chung, Chin-Wook
- Issue Date
- Jan-2017
- Publisher
- AMER INST PHYSICS
- Citation
- PHYSICS OF PLASMAS, v.24, no.1
- Indexed
- SCIE
SCOPUS
- Journal Title
- PHYSICS OF PLASMAS
- Volume
- 24
- Number
- 1
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/153080
- DOI
- 10.1063/1.4972576
- ISSN
- 1070-664X
- Abstract
- A floating type Langmuir probe was studied to measure the electron energy distribution function (EEDF) in plasmas. This method measures the current (I)-voltage (V) curve with rising and falling variations based on a floating potential by using charge-discharge characteristics of the series capacitor when a square-pulse voltage is applied. In addition, this method measures the EEDF by using the alternating current (ac) superposition method. The measured EEDFs were in good agreement with results from a conventional single Langmuir probe. This technique could be applied as a plasma diagnostic method in the capacitively coupled plasma where the plasma potential is extremely high or the processing plasma where the deposition gas is used. Published by AIP Publishing.
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