Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition
- Authors
- Lee, Sanghun; Choi, Hagyoung; Shin, Seokyoon; Park, Joohyun; Ham, Giyul; Jung, Hyunsoo; Jeon, Hyeongtag
- Issue Date
- Apr-2014
- Publisher
- ELSEVIER SCIENCE BV
- Keywords
- Remote plasma atomic layer deposition; Encapsulation; Al2O3; ZrO2
- Citation
- CURRENT APPLIED PHYSICS, v.14, no.4, pp.552 - 557
- Indexed
- SCIE
SCOPUS
KCI
- Journal Title
- CURRENT APPLIED PHYSICS
- Volume
- 14
- Number
- 4
- Start Page
- 552
- End Page
- 557
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160288
- DOI
- 10.1016/j.cap.2013.11.053
- ISSN
- 1567-1739
- Abstract
- We report the permeation barrier properties of Al2O3/ZrO2 multi-layers deposited by remote plasma atomic layer deposition. Electrical Ca degradation tests were performed to derive the water vapor transmission rate (WVTR) of Al2O3, ZrO2 and Al2O3/ZrO2 multi-layers at 50 degrees C and 50% relative humidity (RH). Al2O3/ZrO2 multi-layers exhibit better barrier properties than Al2O3 and ZrO2 layers, and when more individual layers were deposited in the same total thickness, the WVTR value was reduced further, indicating a better barrier property. The WVTR of the Al2O3 and ZrO2 layers were 9.5 x 10(-3) and 1.6 x 10(-2) g/m(2) day, respectively, but when deposited alternatively with 1 cycle of each layer, the WVTR decreased to 9.9 x 10(-4) g/m(2) day. X-ray diffraction results indicated that ZrO2 has a monoclinic structure but Al2O3 and Al2O3/ZrO2 multi-layers show an amorphous structure. Cross sectional Al2O3/ZrO2 multilayer structures and the formation of a ZrAlxOy phase are observed by transmission electron microscopy (TEM). X-ray photoelectron spectrometry (XPS) results indicate that Al2O3 and ZrO2 contain 33.7% and 37.8%, respectively, Al-OH and Zr-OH bonding. However, the ZrAlxOy phase contained 30.5% Al-OH and Zr-OH bonding. The results of transmittance measurement indicate that overall, Al2O3, ZrO2 and Al2O3/ZrO2 multi-layers show high transmittance greater than 80% in the visible region.
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