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Method for the measurement of transferred power to plasma in inductive discharges (vol 547, pg 9, 2013)

Authors
Hwang, Hye-JuKim, Young-CheolChung, Chin-Wook
Issue Date
Jan-2014
Publisher
ELSEVIER SCIENCE SA
Citation
THIN SOLID FILMS, v.551, pp.206 - 206
Indexed
SCIE
SCOPUS
Journal Title
THIN SOLID FILMS
Volume
551
Start Page
206
End Page
206
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/160968
DOI
10.1016/j.tsf.2013.12.028
ISSN
0040-6090
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서울 공과대학 > 서울 전기공학전공 > 1. Journal Articles

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