Seo, Beom-Jun; Jung, Jiwon; Choi, Jae-Hoon; Ahn, Se-Hun; Kim, Nayeon; Chung, Chin-Wook
ArticleIssue Date2026CitationJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, v.44, no.4, pp 1 - 13PublisherAVS Science and Technology Society