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다양한 부유 고조화파 탐침법의 비교연구

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
E to H Heating Mode Transition and Hysteresis in Inductively Coupled Plasma

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ConferenceIssue Date2013Citation66th Gaseous Electronics ConferencePublisherAmerican Physical Society (APS)PlaceNew Jersey
저밀도 유도 결합 플라즈마에서 전자 에너지 분포 측정

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
A new method for measuring pulsed plasma with hightime resolution based on floating harmonic method

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ConferenceIssue Date2013Citation66th Gaseous Electronics ConferencePublisherAmerican Physical Society (APS)
극판 전극이 인가된 유도 결합 플라즈마에서 유도 결합 전기장과 용량성 결합 전기장에 관한 전자 가열 연구

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
이중 주파수의 위상변화에 따른 자기바이어스를 이용한 플라즈마 변수 측정

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
Polymerizable Supramolecular Sensor for Plasma Diagnostics on Wafer Level

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ConferenceIssue Date2013Citation66th Gaseous Electronics ConferencePublisherAmerican Physical Society (APS)PlaceNew Jersey
평판형 탐침을 이용한 공정 챔버 벽 증착 막 두께 측정

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
SMP(Symmetric Multi-Power) 안테나에 의한 플라즈마 밀도 분포 개선에 대한 연구

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
The Digital Matching System with Transformer type for 400 kHz Ferrite inductively Coupled Plasma

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ConferenceIssue Date2012Citation4th ICMAPPublisherKVSPlace제주도
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