ScholarWorks@Hanyang University

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Study on plasma characteristics after ELM crash using electrical probe diagnostics at the Far-SOL region of Tokamak plasma

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ConferenceIssue Date2014Citation21st International Conference on Plasma Surface Interactions in Controlled Fusion DevicesPublisherNIFSPlaceISHIKAWA ONGAKUDO, JAPAN
광방사 세기비를 이용한 공정플라즈마의 변수 진단

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ConferenceIssue Date2011Citation한국진공학회 하계 정기 학술대회Publisher한국진공학회Place대구 exco
The effect of inhomogeneous ohmic heating on the electron energy probability functions in an oxygen capacitively coupled plasma

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
Effect of N2 on decomposition of CO2 using a hybrid plasma source

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
A method to measure the negative ion density distribution using a planar Langmuir probe in low- pressure oxygen plasmas

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
Comparison of pressure dependence on electron temperature in a high density Ar/O2 inductively coupled plasma

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ConferenceIssue Date2019Citation제56회 동계정기학술대회Publisher한국진공학회Place대명 비발디파크
The effect of electron attachment and detachment on electron energy probability function in an inductive oxygen discharge

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
Electron energy probability function measurement in a 2 MHz and 13.56 MHz dual frequency capacitively argon discharge

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
Modified floating harmonic method by analyzing the harmonic currents of a DC blocking capacitor in a floating probe

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
Characterization of an inductively coupled plasma(ICP) source for ion implantation process

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ConferenceIssue Date2019CitationThe 72nd Annual Gaseous Electronics ConferencePublisherAmerican Physical SocietyPlaceTexas A&M Hotel
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