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Results 1-6 of 6 (Search time: 0.007 seconds).
Comparison of pressure dependence on electron temperature in a high density Ar/O2 inductively coupled plasma
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Measurement of plasma parameters using harmonic voltage of capacitor in floating Langmuir probe
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Measurements of electron energy probability function in 2 MHz and 13.56 MHz dual frequency capacitively coupled argon plasma
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Capacitive load effect on sideband currents in a floating harmonic method with dual frequency probe bias
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
The measurement of negative ion fraction considering the sheath expansion at oxygen inductively coupled plasmas using two-probe technique
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
Improving inductively coupled plasma(ICP) source for ion implantation using termination capacitor
정진욱
Conference
Issue Date
2019
Citation
제56회 동계정기학술대회
Publisher
한국진공학회
Place
대명 비발디파크
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