Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Measurements of electron energy probability function in 2 MHz and 13.56 MHz dual frequency capacitively coupled argon plasma
- Authors
- 정진욱
- Issue Date
- 20-Feb-2019
- Place
- 대명 비발디파크
- Conference Name
- 제56회 동계정기학술대회
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)