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Plasma diagnostic method for pulsed plasmas using sideband harmonic technique

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ConferenceIssue Date2015Citation14th International Union of Materials Research Societies-International Conference on Advanced MaterialsPublisherIUMRSPlaceJeju, Korea
Mode transition of power dissipation in and plasma parameters in an asymmetric capacitive discharge

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ConferenceIssue Date2012Citation4th ICMAPPublisherKVSPlace제주도
Plasma characteristics in inductively abd capacitively coupled hybrid source using single RF power

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ConferenceIssue Date2016Citation69th Annual Gaseous Electronics ConferencePublisherAmerican Physical Society
Characteristics of electron cyclotron resonance in magnetized solenoid type inductively coupled plasmas

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ConferenceIssue Date2012Citation"4th ICMAPPublisherKVSPlace제주도
investigation on hysteresis of neon plasma in inductive discharge

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ConferenceIssue Date2021Citation한국진공학회 제61회 하계정기학술대회Publisher한국진공학회Place제주도 소노캄
아르곤/헬륨 혼합 가스에서 부유 고조화 분석법을 사용한 개별 이온 밀도 측정 방법

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ConferenceIssue Date2021Citation한국진공학회 제61회 하계정기학술대회Publisher한국진공학회Place제주도 소노캄
고주파수 고조화 분석법을 이용한 펄스 플라즈마 진단

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ConferenceIssue Date2021Citation한국진공학회 제61회 하계정기학술대회Publisher한국진공학회Place제주도 소노캄
A study on measurement of the surface charge accumulation using anodic aluminum oxide template

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ConferenceIssue Date2013Citation66th Gaseous Electronics ConferencePublisherAmerican Physical Society (APS)PlaceNew Jersey
Effect of Radio Frequency Bias on the Plasma Density and Electron Heating in Inductive Discharge

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ConferenceIssue Date2013Citation66th Gaseous Electronics ConferencePublisherAmerican Physical Society (APS)
유도결합 플라즈마에서 임피던스 정합조건을 이용한 비침투식 진단방법

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ConferenceIssue Date2013Citation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)Publisher한국진공학회Place휘닉스파크
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