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Effects of amorphous InGaZnO thin film transistors with various buffer layers on polyimide substrate under negative bias-temperature stresses

Authors
Ok, Kyung-ChulPark, Sang-Hee KoHwang, Chi-SunShin, Hyun SooKim, DaehwanBae, JongukChin, Byung DooPark, Jin-Seong
Issue Date
Jun-2013
Publisher
Blackwell Publishing Ltd
Keywords
Buffer layers; Device Instability; Flexible device; Oxide semiconductor thin film transistor
Citation
Digest of Technical Papers - SID International Symposium, v.44, no.1, pp.1229 - 1231
Indexed
SCOPUS
Journal Title
Digest of Technical Papers - SID International Symposium
Volume
44
Number
1
Start Page
1229
End Page
1231
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/162706
DOI
10.1002/j.2168-0159.2013.tb06453.x
ISSN
0097-966X
Abstract
Buffer layers on flexible substrates have strongly affected to electrical performance and instability in oxide TFTs. The oxide TFT on proper buffer layer/PI substrate showed better electrical performance than that on other buffer layers because the buffer layer with high gas diffusion barrier properties can suppress to generate defect states in semiconductor and/or interface from hydrogen and water penetration. The origins of flexible oxide TFT instabilities were systematically investigated by using in-situ/ex-situ measurement and chemical/physical analysis.
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