ConferenceIssue Date2011CitationThe 4th International Conference on PLAsma-NanoTechnology & SciencePublisherPlasma Nanotechnology Research Center, Nagoya UniversityPlace일본
ConferenceIssue Date2011CitationThe third international conference on microelectronis and plasma technology.PublisherICMAP2011 Organizing CommitteePlacechina, Dalian
ConferenceIssue Date2011Citationthe third international conference on microelectronics and plasma technologyPublisherchinese vacuum societyPlacedalian,china
ConferenceIssue Date2011Citationthe third international conference on microelectronics and plasma technologyPublisherchinese vacuum societyPlacedalian, china
ConferenceIssue Date2011Citationthe third international conference on microelectronics and plasma technologyPublisherchinese vacuum societyPlacedalian, china