Evolution of Two-Dimensional Plasma Density on the E-H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma
- Authors
- Lee, Hyo-Chang; Kim, Young-Cheol; Chung, Chin-Wook
- Issue Date
- Nov-2011
- Publisher
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
- Keywords
- Capacitive mode; capacitive-inductive (E-H) heating-mode transition; electron local kinetics; electron nonlocal kinetics; inductive mode; inductively coupled plasma (ICP); plasma heating
- Citation
- IEEE TRANSACTIONS ON PLASMA SCIENCE, v.39, no.11, pp.2536 - 2537
- Indexed
- SCIE
SCOPUS
- Journal Title
- IEEE TRANSACTIONS ON PLASMA SCIENCE
- Volume
- 39
- Number
- 11
- Start Page
- 2536
- End Page
- 2537
- URI
- https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/167250
- DOI
- 10.1109/TPS.2011.2135382
- ISSN
- 0093-3813
- Abstract
- Inductively coupled plasmas have two operational modes, i.e., capacitive (E) and inductive (H). In this paper, a 2-D plasma density profile was measured with gas pressures during the E-H heating-mode transition. When the discharge is transited from the E mode to the H mode, the 2-D plasma density profile was not changed at a low gas pressure, whereas the evolution of the 2-D plasma density profile was observed at a high gas pressure. These different changes with the gas pressures on the E-H heating-mode transition originated from the transition of the electron kinetics from the nonlocal kinetics to the local kinetics.
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