A multi-level capacitor-less memory cell fabricated on a nano-scale strained silicon-on-insulator

Abstract

A multi-level capacitor-less memory cell was fabricated with a fully depleted n-metal-oxide-semiconductor field-effect transistor on a nano-scale strained silicon channel on insulator (FD sSOI n-MOSFET). The 0.73% biaxial tensile strain in the silicon channel of the FD sSOI n-MOSFET enhanced the effective electron mobility to similar to 1.7 times that with an unstrained silicon channel. This thereby enables both front-and back-gate cell operations, demonstrating eight-level volatile memory-cell operation with a 1 ms retention time and 12 mu A memory margin. This is a step toward achieving a terabit volatile memory cell.